Horizontal systems
META series
Horizontal coating systems of different sizes with a chamber diameter of approx. 1,000 to 2,050 mm and a variable useful length of approx. 1,250 to 2,900 mm. The number of source groups is optional up a maximum of three or four units. Al, Cu, CrNi, Ag, Au as well as compounds of ZnS, MgF2 and SiOx can be used as material to be deposited. The typical film thickness is 0.05 to 0.3 µm depending on the application.
Short deposition times, a very efficient use of materials and media as well as individual automated charging systems guarantee a high productivity at a constant quality and thus an extremely economical batch operation. The batch times are 10 to 40 minutes depending on the application.
Optional plant components such as a plasma polymerisation device for depositing a transparent protective film or a thick film evaporator for applying metal coatings of a thickness between 1 and 3 µm as well as peripheral devices can extend the plants' range of applications.
Reference objects: META 1100, META 1450, META 1800, META 1900, META 2050
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Short deposition times, a very efficient use of materials and media as well as individual automated charging systems guarantee a high productivity at a constant quality and thus an extremely economical batch operation. The batch times are 10 to 40 minutes depending on the application.
Optional plant components such as a plasma polymerisation device for depositing a transparent protective film or a thick film evaporator for applying metal coatings of a thickness between 1 and 3 µm as well as peripheral devices can extend the plants' range of applications.
Reference objects: META 1100, META 1450, META 1800, META 1900, META 2050
META 1100 [ 
data sheet ]
META 1450 [ data sheet ]
META 1800 [ data sheet ]
META 1900 [ data sheet ]
META 2050 [ data sheet ]
data sheet ]META 1450 [
data sheet ]META 1800 [
data sheet ]META 1900 [
data sheet ]META 2050 [
data sheet ]