VTD Vakuumtechnik Dresden GmbH
Niedersedlitzer Straße 75
01257 Dresden

Phone:+49 351 - 2805-0
Fax:+49 351 - 2805-240

Plasma treatment

A plasma treatment is aimed at different objectives such as:
  • Enhancement of adhesion
  • Removal of the "water skin"
  • Activation of the substrate surface
  • Modification of the substrate surface
  • Cleaning of the substrate surface
A plasma surface treatment is part and parcel of almost all technologies employed by VTD. But it is also used separately before lacquering or for cleaning purposes. Cleaning procedures using plasmas at low pressure allow the microscopically thorough, non-aggressive and mechanically non-destructive removal of absorbates such as oxide layers, organic contaminations (oil, wax, paint) and micro-organisms (sterilisation) from surfaces and hydrophilisation or activation of plastic surfaces.

A plasma is usually ignited after evacuation to a process pressure between 5 x 10-2 to 9 x 10-1 mbar. A glow discharge plasma which can be maintained by both a direct current and a alternating current source is preferred. Gases such as air, nitrogen, argon, oxygen or their mixtures are often used as process gases. The ions and electrons produced in the plasma now act on the substrate surface. The particles of the plasma and that of the substrate interact on the surface and in the areas that are close to the surface. This interaction can, for example, result in the removal of adsorbed particles (e.g. H2O) from the surface, the excitation of surface atoms, the breaking-up of compounds on the substrate surface, the modification of the substrate surface through chemical reactions. One of these processes can be prioritised by selecting the appropriate process parameters (type of plasma, pressure, process gas, voltage, current).